FP-21T Precision 導入事例

東京大学 物性研究所 ナノスケール物性研究部門 リップマー研究室

Prototyping Printed Board Making System For thin film patterning
on SrTiO3 substrates

FP-21T Precision

XYZ resolution : 1µm

Minimum milling width : 50µm

achieved for printed board

Can we apply this for thin films on SrTiO3 substrates?

Hall bar and so on...

Difficulty No. 1

Detection of milling cutter contact with SrTiO3substrate

Printed board is conductive due to surface thick metal layer (up to 10 µm) and can be detected by electric contact.
But SrTiO3is insulator.
Even if conductive film is deposited, it is too thin for electric detection.

Image Detection

Difficulty No. 1

Difficulty No. 2

Milling of hard, fragile SrTiO3

Printed board is soft, which includes surface metal layer and plastic board

Milling parameters optimization

Milling parameters

Milling cutter
50/100/150/200 µm
Rotation speedfrom 5 to 60 Krpm
Milling depthup to 5 µm
Lateral milling speedfrom 0.1 to 2 mm/s


Parameters optimization summary

Lower rotation speed is better
Although too low speed is unstable to hold constant speed
Opt.: 20 Krpm
Depth is not so critical
Although too deep results in shorter cutter life time
Opt.: up to 5 µm
Lower lateral milling speed is betterMin.: 0.1 mm/s
Milling cutter diameter dependence is unknownHopefully no dependence
                        Difficulty No. 2

Parameters optimization summary

                        Difficulty No. 2
                        Difficulty No. 2

FP-21T Precision の優位性

物性研究するための手段として -

  • 簡単にドライで加工できる
  • フォトリソグラフィプロセスを省略できる(高価な装置がなくてもいい)
  • 薬品を使わないで作成できる
  • 酸化物でも加工できる
  • Hall bar等が簡単に作れる
  • 精度がいい