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FP-21T Precision 導入事例

Prototyping Printed Board Making System For thin film patterning
on SrTiO3 substrates

東京大学 物性研究所 ナノスケール物性研究部門 リップマー研究室

FP-21T Precision

XYZ resolution : 1µm
Minimum milling width :

achieved for printed board

Can we apply this for thin films on SrTiO3 substrates?

Hall bar and so on...

Difficulty No. 1

Detection of milling cutter contact with SrTiO3 substrate
Printed board is conductive due to surface thick metal layer (up to 10 µm) and can be detected by electric contact.
But SrTiO3 is insulator.
Even if conductive film is deposited, it is too thin for electric detection.

Image Detection

Difficulty No. 2

Milling of hard, fragile SrTiO3
Printed board is soft, which includes surface metal layer and plastic board

Milling parameters optimization

Milling parameters
Milling cutter diameter 50/100/150/200 µm
Rotation speed from 5 to 60 Krpm
Milling depth up to 5 µm
Lateral milling speed from 0.1 to 2 mm/s


Parameters optimization summary

- Lower rotation speed is better
Although too low speed is unstable to hold constant speed
Opt.: 20 Krpm
- Depth is not so critical
Although too deep results in shorter cutter life time
Opt.: up to 5 µm
- Lower lateral milling speed is better Min.: 0.1 mm/s
- Milling cutter diameter dependence is unknown Hopefully no dependence

Parameters optimization summary

FP-21T Precision の優位性

- 物性研究するための手段として -
  • 簡単にドライで加工できる
  • フォトリソグラフィプロセスを省略できる(高価な装置がなくてもいい)
  • 薬品を使わないで作成できる
  • 酸化物でも加工できる
  • Hall bar等が簡単に作れる
  • 精度がいい




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